(1) Kev kho mob ua ntej PVD, suav nrog kev tu cov khoom thiab kev kho mob ua ntej.Cov kev tu tshwj xeeb suav nrog kev ntxuav cov tshuaj ntxuav tes, tshuaj ntxuav cov kuab tshuaj, ntxuav ultrasonic, thiab ntxuav ion foob pob.
(2) Muab tso rau hauv qhov cub, nrog rau lub tshuab nqus tsev tu thiab cov khoom siv, thiab kev teeb tsa, kev ua haujlwm thiab kev sib txuas ntawm cov khoom thiab cov khoom siv.
(3) Lub tshuab nqus tsev, feem ntau siv rau 6.6Pa lossis ntau dua, qhib rau pem hauv ntej ntawm lub twj tso kua mis diffusion ua ntej kom tswj tau lub tshuab nqus tsev twj tso kua mis thiab ua kom sov lub diffusion twj tso kua mis.Tom qab preheating yog txaus, lub siab valve yog qhib thiab pumped mus rau ib tug 6 x 10-3 Pa ib nrab hauv qab nqus tsev vacuum nrog ib tug diffusion twj tso kua mis.
(4) Ci, ci cov khoom mus rau qhov xav tau kub.
(5) Ion bombardment, lub tshuab nqus tsev feem ntau yog 10 Pa mus rau 10-1 Pa, lub ion bombardment voltage yog qhov tsis zoo siab voltage ntawm 200 V rau 1 KV, thiab lub sij hawm tawm tsam yog 15 min mus rau 30 min.
(6) Pre-melting, kho qhov tam sim no rau pre-melt cov khoom, kho qhov tam sim no rau pre-melt lub plating thiab degassing rau 1min ~ 2min.Evaporating deposition.Cov evaporation tam sim no raug kho raws li qhov xav tau kom txog rau thaum lub sijhawm xav tau tso tawm tas.Txias, cov khoom yog txias rau ib qho kub ntawm lub tshuab nqus tsev chamber.
(7) Tom qab cov khoom raug tshem tawm, lub tshuab nqus tsev yog kaw, lub tshuab nqus tsev tau khiav tawm mus rau l × l0-1Pa, thiab lub tshuab nqus tsev vacuum yog txias rau qhov ntsuas kub ua ntej lub twj tso kua mis tu thiab cov dej txias tuaj yeem muab tua.